Products
Bossmen Precision Mask Pod Storage Cabinet
【Bossmen-Precision Clean Photomask Storage Cabinet】
- Independent nitrogen monitoring for storage locations
- Photomask storage RFID program control
- Cabinet access control card swiping construction, storage location independent temperature and humidity monitoring
- Independent flow monitoring of storage position and nitrogen flow report of photomask box
- Alert mechanism Independent alarm for abnormal storage position
- Reticle box independent air inlet nitrogen purification device
- ULPA Mesh Chemical Filter
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- EUV POD 精密潔淨光罩儲存櫃
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- RSP 200 精密潔淨光罩儲存櫃
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- 光罩盒
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- 氮氣, 溫溼度監控
| Main Function | Sectional Function | Description |
| 1. Air Supply System | 1. XCDA (Dry Air) Air pump activation and confirmation | The FFU air volume can be set. When the FFU is activated, the XCDA will activate the air pump. |
| 2. N2 (Nitrogen) Air pump activation and confirmation | Nitrogen is filtered through a nitrogen purifier and then split into individual reticle boxes. A temperature and humidity sensor is placed in the air outlet pipe to monitor the flow of nitrogen gas out of the mask box. | |
| 2. Filter System | 1. Programmable fan-filter unit (FFU) | Use the oxygen concentration value as the setting for FFU activation. |
| 2. Chemical filter | Can filter carbonate ions, sulfides, ammonia and other chemical pollutants in dry air. | |
| 3. Air filter (ULPA) | Can filter extremely fine particles up to class 1 level. | |
| 4. Nitrogen purifier | Can filter carbonate ions, sulfides, ammonia and other chemical pollutants in nitrogen. |
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