[Bossmen-Precision Clean Nanoscale Photomask Storage Cabinet] Specifications:
Photomask is an interface mold for converting various circuit design patterns of integrated circuits into wafer production. It is an important role for circuit design patterns to be reverse-printed on wafers after exposure and exposure.
Once the quality of the mask is defective, it will always be copied to the die of the wafer, which directly affects the yield of the wafer. As the lithography pattern becomes finer, the risk of reticle contamination and yield loss increases.
Due to the delicate and easily damaged characteristics of the photomask coating, foreign dust and chemical residues are potential sources of contamination.
In addition to the quality of the reticle manufacturing, the way it is stored is also very important.
Generally, the photomask storage box is stored in a clean and airtight nitrogen cabinet, because nitrogen can not only remove chemical pollution on the photomask, but also maintain a proper humidity environment. Bossmen photomask storage nitrogen cabinet not only provides clean and dry photomask storage space, but also has an energy-saving design, which saves more than 80% of nitrogen consumption compared to traditional nitrogen cabinets, and the visual temperature and humidity display improves the reliability of storage.
1. Size: Customized size, designed according to the number of photomask boxes.
2. Cabinet: stainless steel cabinet material; glass windows, high-load brake wheels, leveling feet.
3. Intake source: nitrogen and XCDA.
4. Photomask storage and removal management: access control card swiping, RFID program control.
5. Independent nitrogen flow monitoring and flow reporting for each photomask box in the storage position, ultra-environmentally friendly and energy-saving design.
6. The cabinet is equipped with ULPA net and chemical filter, positive pressure dustproof and clean design.
7. Temperature and humidity monitoring: temperature and humidity can be set, recorded, alarmed, and offset corrected. Humidity 5%-60%RH can be adjusted.
8. Warning function: abnormal alarm and record when the photomask box is put in and taken out.
9. Safety mode: door open time is too long alarm, humidity is too high alarm, oxygen concentration is too high alarm.
10. Power supply: 220 V, 60Hz.
Main function | Sectional function | Description |
1. Air supply system | 1.XCDA (dry air) intake start and confirmation | The FFU air volume can be set. When the FFU is activated, the XCDA will activate the air intake. |
2.N2 (nitrogen) intake start and confirmation | Nitrogen is filtered through a nitrogen purifier and then split into individual reticle boxes. A temperature and humidity sensor is placed in the air outlet pipe to monitor the flow of nitrogen gas out of the mask box. | |
2. Filtering system | 1. Programmable filter pinwheel (FFU) | Use the oxygen concentration value as the setting for FFU activation. |
2.Chemical filter | Can filter carbonate ions, sulfides, ammonia and other chemical pollutants in dry air. | |
3. Air filter (ULPA) | Can filter very fine dust up to class 1 level. | |
4. Nitrogen purifier | Can filter carbonate ions, sulfides, ammonia and other chemical pollutants in nitrogen. |
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