Photomask High-Efficiency Clean Return Air System ,Photomask Clean Return Air Cabinet

The Particle-Free Reticle Pod Nitrogen Cabinet continuously filters and circulates clean air through an efficient return air system.

Particle-Free Reticle Pod Nitrogen Cabinet - The Particle-Free Reticle Pod Nitrogen Cabinet continuously filters and circulates clean air through an efficient return air system.
  • Particle-Free Reticle Pod Nitrogen Cabinet - The Particle-Free Reticle Pod Nitrogen Cabinet continuously filters and circulates clean air through an efficient return air system.

Particle-Free Reticle Pod Nitrogen Cabinet

BM1305

Photomask High-Efficiency Clean Return Air System ,Photomask Clean Return Air Cabinet

In the Particle-Free Reticle Pod Nitrogen Cabinet, the return air system continuously recirculates the air inside the cabinet and filters out particles and contaminants. This ensures that photomasks are maintained in a clean, dust-free environment, effectively reducing the risk of damage and contamination while maintaining stable quality.

Features
  • Material and Design: Made of stainless steel SUS 304 with a glossy finish, offering corrosion and oxidation resistance. It is equipped with anti-slip shock-absorbing rubber feet, ensuring a sturdy structure and long-lasting durability.
  • Humidity Setting and Energy Control: The humidity range can be set from 1% to 60% RH, and energy-saving effects are achieved by automatically controlling the gas flow, effectively reducing energy consumption.
  • Data Storage and Connectivity: Built-in memory for easy data management and integration with external devices, allowing retrieval of photomask data for tracking.
  • Buzzer and Flashing Alarm: When environmental conditions are abnormal or the set range is exceeded, the device will emit a buzzer sound and flashing warning lights to promptly alert users to address the issue.
Application
  • Shelving for Safe Storage Environment: The storage of photomask pods is critical. Our product features sturdy shelving, providing a safe and stable storage environment to ensure the integrity of the photomasks.
  • Nitrogen Filling for Moisture Control: Using nitrogen filling technology, the humidity in the storage space is significantly reduced, preventing moisture damage to the photomasks and extending their lifespan.
  • Temperature and Humidity Monitoring for Stable Environment: Equipped with a high-precision temperature and humidity monitoring system, the cabinet continuously checks environmental changes to ensure photomasks are stored under optimal conditions.
  • FFU and ULPA Clean Processing: Advanced FFU and ULPA filtration technology is used to provide an ultra-clean storage space, preventing contaminants from affecting the quality of the photomasks.
  • Intelligent Management System: The cabinet is designed with an FFU (ULPA) clean system for photomask storage, paired with software data upload functions. It features password-protected operation, barcode reading, and error alert systems to ensure secure and accurate handling at every step.
  • Return Air Clean System: The return air system draws in the air from inside the cabinet, filters it, and removes contaminants, ensuring the photomasks are stored in a clean, dust-free environment, reducing the risk of damage and contamination.
Product Specifications
ModelRFID Clean Return Air Reticle Nitrogen Storage Cabinet
BM1305
External Dimensions (mm)W1780 × H2131 × D600
Storage ItemRSP-200-ABS Reticle Pods
Temperature Display Range0.1 °C to 99.9 °C ± 1 °C
Humidity Control Range1% RH to 60% RH ± 3% RH
Capacity56 Reticle Pods
Power Supply110 V / 240 V
Frequency50 Hz / 60 Hz
Gallery
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Particle-Free Reticle Pod Nitrogen Cabinet – Precision Humidity Control by BOSSMEN

The Particle-Free Reticle Pod Nitrogen Cabinet is designed to protect sensitive materials, electronics, and instruments from moisture damage. BOSSMEN integrates advanced humidity control systems to maintain stable RH levels, ensuring reliability in manufacturing, laboratories, and research facilities.

Engineered with precision and durability, the Particle-Free Reticle Pod Nitrogen Cabinet offers consistent performance for long-term storage and process environments. From cleanrooms to quality labs, BOSSMEN products help users reduce corrosion, oxidation, and ESD risks while maintaining compliance with strict environmental standards.

Discover how the Particle-Free Reticle Pod Nitrogen Cabinet enhances productivity and preservation in your workflow. Each unit reflects BOSSMEN’s thirty years of humidity control expertise, combining innovation, safety, and measurable value for industrial and laboratory applications.