Photomask Storage System ,Clean Nitrogen Photomask Storage Cabinet

Multi-purpose Reticle Pod Nitrogen Storage Cabinet

Multi-purpose Reticle Pod Nitrogen Storage Cabinet - Multi-purpose Reticle Pod Nitrogen Storage Cabinet
  • Multi-purpose Reticle Pod Nitrogen Storage Cabinet - Multi-purpose Reticle Pod Nitrogen Storage Cabinet

Multi-purpose Reticle Pod Nitrogen Storage Cabinet

BM1296-2

Photomask Storage System ,Clean Nitrogen Photomask Storage Cabinet

Photomasks are essential in semiconductor manufacturing for transferring circuit patterns onto wafers. Any defect in a photomask can be replicated across the wafer, directly affecting yield. As pattern dimensions shrink, photomasks become increasingly sensitive to particles and chemical contamination.

A clean, controlled nitrogen storage environment is critical for maintaining long-term photomask stability, helping reduce contamination, oxidation, and degradation.

The Bossmen Multi-purpose Reticle Pod Nitrogen Storage Cabinet delivers precise and stable environmental control, making it ideal for photomasks and wafer pods that require highly controlled storage conditions.

Features
  • Upper Airtight Zone and Nitrogen Filling: The upper part of the storage cabinet is designed with an airtight zone specifically for single photomask pod storage. The entire area is filled with nitrogen to ensure optimal moisture protection. Additionally, an integrated temperature and humidity monitoring system constantly checks environmental changes to maintain stable storage conditions.
  • Lower Open Area and POD Storage: The lower open area can accommodate up to five PODs, with each FOUP individually filled with nitrogen to ensure each product receives the best protection.
  • Real-time Monitoring and Nitrogen Flow Display: The panel displays the total nitrogen flow for each lower compartment. When no FOUP is present in the storage slot, nitrogen filling automatically stops, enabling smart management to enhance safety and efficiency.
Application
  • Highly Customized Design: Based on different needs, the photomask cabinet can be customized to store varying quantities of photomasks and tailored to the cabinet structure, offering the best storage solutions to meet the demands of different scales and production environments.
  • Precision Protection and Stable Environment Control: The interior allows for precise humidity adjustment and features an anti-static design to effectively protect photomasks, preventing contamination and static electricity from affecting their quality, ensuring stable photomask performance.
  • Improved Work Efficiency: The photomask cabinet provides convenient storage space and operational design, making it easy to access and store photomasks quickly, improving operational efficiency and reducing delays in the production process.
  • Reliability and Long-term Protection: The cabinet is built with a sturdy structure, ensuring long-term durability while maintaining excellent protective effects to prevent photomasks from being damaged due to external environmental changes.
Benefit
  • These advantages make the photomask cabinet an indispensable piece of equipment in the semiconductor, optoelectronics, and precision manufacturing industries, enhancing production efficiency while significantly reducing operational costs.
Product Specifications
ModelMulti-purpose Reticle Nitrogen Storage Cabinet
BM1296-2
External Dimensions (mm)W1500 × H1901 × D700
Storage ItemsPhotomask Pods, Wafer Transport Pods
Temperature Display Range0.1 °C to 99.9 °C ± 1 °C
Humidity Control Range1% RH to 60% RH ± 3% RH
Power Consumption16 W
Capacity Upper Level: 60 Photomask Pods
Lower Level: 15 Wafer Transport Pods
Power Supply110 V / 240 V
Frequency50 Hz / 60 Hz
Gallery
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