With over 80% nitrogen savings and real-time temp / humidity monitoring, it ensures stable, long-term storage—boosting yield and production reliability.
Compact, energy-efficient, and user-friendly—an essential solution for high-performance fabs.

Features

• Material and Design: Made of stainless steel SUS 304 with a polished surface, offering advantages of corrosion resistance and oxidation resistance. It is equipped with anti-slip vibration-damping rubber feet, ensuring a sturdy structure and long-lasting durability.
• Nitrogen Flow Adjustment: Equipped with an adjustable nitrogen flow meter with a range of 5 ~ 50 LPM, ensuring stable nitrogen supply to meet different storage requirements.
• High-Precision Temperature and Humidity Control: Built-in high-precision temperature and humidity sensors, with real-time monitoring via an LED digital display. Humidity is accurate to within 3% RH.
• Humidity Setting and Energy Control: Humidity can be set between 1% ~ 60% RH, and energy-saving effects are achieved by automatically controlling the gas flow, effectively reducing energy consumption.
• Data Storage and Connectivity Features: Built-in memory can store up to 11,900 data entries. It supports RS232 connectivity and various export formats, making data management and integration with external devices convenient.
• Buzzer and Flashing Alarm: The device will emit a buzzer and flashing warning light when environmental conditions are abnormal or when the set range is exceeded, promptly alerting the user to address the issue.
• Panel Lock Function: Features a panel lock function to prevent accidental touch or adjustment of settings, ensuring the stability and safety of the device configuration.
• Offset Calibration Function: Equipped with an offset calibration function, allowing users to calibrate the sensor or device data to ensure measurement accuracy and reliability.

Benefit

• Significant Nitrogen Savings: Tested by the Industrial Technology Research Institute (ITRI), the reticle cabinet effectively saves over 80% of nitrogen flow, reducing nitrogen consumption and helping businesses cut costs, while maintaining the cleanliness and stability of the reticles.
• Highly Customizable Design: Based on different requirements, the reticle cabinet can be customized to accommodate various reticle storage quantities and cabinet structures, providing the best storage solutions to meet the needs of different scales and production environments.
• Precision Protection and Stable Environmental Control: The interior can precisely adjust humidity, and with an anti-static design, it effectively protects the reticles from contamination and static electricity, ensuring stable reticle quality.
• Improved Work Efficiency: The reticle cabinet offers convenient storage space and operational design, making it easy to quickly access and store reticles, enhancing operational efficiency and reducing delays in the production process.
• Reliability and Long-Lasting Protection: With a robust structure, the reticle cabinet maintains excellent protection over long-term use, preventing damage to reticles caused by environmental changes.

These advantages make the reticle cabinet an indispensable piece of equipment in the semiconductor, optoelectronics, and precision manufacturing industries, improving production efficiency while significantly reducing operational costs.

Gallery

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  The Mask Storage Nitrogen Cabinet can be customized for storage capacity.

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  The Mask Storage Nitrogen Cabinet, tested by ITRI, saves over 80% of nitrogen flow, reducing consumption and costs.