Reticle Pod Nitrogen Storage Cabinet with FFU & ULPA Filter – Precision Humidity Control by BOSSMEN
The Reticle Pod Nitrogen Storage Cabinet with FFU & ULPA Filter is designed to protect reticles and masks from contamination and oxidation in semiconductor and photonics cleanrooms. It features ULPA filtration, FFU airflow, and continuous nitrogen purge to maintain a clean, dry, and static-free environment.
Reticle Pod Nitrogen Storage Cabinet with FFU & ULPA Filter
BM1277
Inert Gas Reticle Storage Cabinet (with FFU and ULPA Filter) High-Cleanliness Reticle Pod Storage System (Nitrogen-Purged Type)
The Reticle Pod Nitrogen Storage Cabinet with FFU & ULPA Filter is designed to protect reticles and masks from contamination and oxidation in semiconductor and photonics cleanrooms. It features ULPA filtration, FFU airflow, and continuous nitrogen purge to maintain a clean, dry, and static-free environment.
Built with anti-static materials and airtight construction, it supports Class 100 or better cleanroom standards. Automated nitrogen control and differential pressure monitoring improve efficiency and extend reticle life.
Custom sizes and MES integration are available for smart factory applications.
Features
- Material and Design: Made of stainless steel SUS 304 with a glossy finish, offering corrosion and oxidation resistance. It is equipped with anti-slip shock-absorbing rubber feet for a sturdy structure and long-lasting durability.
- High Precision Humidity Control: Real-time monitoring via LED digital display, with humidity accuracy up to 3% RH. The humidity range can be set from 1% to 60% RH, and automatic gas flow control helps achieve energy-saving effects, effectively reducing energy consumption.
Benefit
- Equipped with Shelves for Safe Storage: The storage of reticle pods is crucial. Our product features sturdy shelves that provide a secure and stable storage environment, ensuring the integrity of the reticles.
- Nitrogen Filling: The nitrogen filling technology reduces humidity in the storage space, effectively preventing moisture damage to the reticles and extending their lifespan.
- Temperature and Humidity Monitoring for Stable Environment: Built-in high-precision temperature and humidity monitoring system constantly detects environmental changes to ensure optimal storage conditions for reticles.
- FFU and ULPA Clean Treatment: Advanced FFU and ULPA filtration technologies are used to provide an ultra-clean storage space, preventing any contaminants from affecting the quality of the reticles.
- Tilted Design for Anti-Slip Safety: The cabinet shelves are designed with a backward tilt, effectively preventing reticles from slipping, ensuring each reticle is stored safely.
Product Specifications
| Model | Reticle Pod Nitrogen Cabinet FFU + ULPA BM1277 |
|---|---|
| External Dimensions (mm) | W2080 x H1000 x D550 |
| Stored Contents | Reticle pod |
| Temperature Display | 0.1°C ~ 99.9°C ± 1°C |
| Humidity Control Range | 1%RH ~ 60% ± 3%RH |
| Power Consumption | 16W |
| Capacity | 66PCS |
| Voltage | 110V/240V |
| Frequency | 50Hz/60Hz |
- Gallery
BM1277 Reticle Pod Nitrogen Storage Cabinet with FFU & ULPA Filter.
The Reticle Pod Nitrogen Cabinet uses FFU and ULPA filters to provide a clean storage space, protecting photomasks from contamination.
The Reticle Pod Nitrogen Cabinet has slanted shelves that prevent photomasks from slipping, ensuring safe storage.
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Reticle Pod Nitrogen Storage Cabinet with FFU & ULPA Filter – Precision Humidity Control by BOSSMEN
The Reticle Pod Nitrogen Storage Cabinet with FFU & ULPA Filter is designed to protect sensitive materials, electronics, and instruments from moisture damage. BOSSMEN integrates advanced humidity control systems to maintain stable RH levels, ensuring reliability in manufacturing, laboratories, and research facilities.
Engineered with precision and durability, the Reticle Pod Nitrogen Storage Cabinet with FFU & ULPA Filter offers consistent performance for long-term storage and process environments. From cleanrooms to quality labs, BOSSMEN products help users reduce corrosion, oxidation, and ESD risks while maintaining compliance with strict environmental standards.
Discover how the Reticle Pod Nitrogen Storage Cabinet with FFU & ULPA Filter enhances productivity and preservation in your workflow. Each unit reflects BOSSMEN’s thirty years of humidity control expertise, combining innovation, safety, and measurable value for industrial and laboratory applications.